運行先進的加工程序的現有的和新的晶圓廠面臨比以往更艱巨的參數測試挑戰,必然地,參數測試已經超出了單純地DC測量,目前包括很多種不同地測量類型,包括平行測試,閃存寫入測試/抹除測試和RF S-參數描述。安捷倫科技預見這些需求研發了靈活通用的4080參數測試平臺。
下一代測試平臺運用超速CPU提高性能
設計新穎的4080系列參數測試平臺將功能更強大的CPU和其他改進的架構相結合,無需調試程序即可提高轉換的4070系列平臺性能10%到20%,降低了測試時間節約成本。
虛擬多重測試技術提高動態吞吐量
所有運行SPECS(半導體加工過程評價核心軟件)的4080系列檢測儀采用安捷倫虛擬多重測試技術,都支持同步和異步平行測試。運用該技術與適當的測試元素組(TEG)設計相結合,使吞吐量較傳統系列技術提高50%以上成為可能。
靈活的安裝降低成本
4080系列測試儀有兩種型號:標準低電流測試儀和超低電流測試儀,使您為每個4080系列測試儀選擇最經濟的配置
高速電容測試時間降低測試成本
4080系列測試儀支持可選的高速電容測試組件(HS-CMU),該組件集成到測試頭電子中
HV-SPGU支持下一代閃存單元處理測試
4082F和4083A都支持半導體脈沖發生器組件(SPGU),主機和高壓SPGU模塊,支持先進閃存單元技術測試
RF S-參數測量和可選RF矩陣允許生產中的RF結構進行有效測試
4083A支持安捷倫PNA用于20 GHz S-參數測量。另外,20 GHz 的寬帶的8x10 RF矩陣中測試多達5個RF結構。
統一的硬件平臺節約投資
4080系列測試儀共享軟件,易于升級,節約投資,避免設備陳舊。
復合SEMI自動化標準
SPECS-FA是安捷倫SPECS參數測試環境的工廠自動化版本,可以在4080系列測試儀所有家族產品中運行,SPECS-FA完全支持SEMI自動化標準E5 (SECS II), E30 (GEM), E87 (CMS), E39 (OSS), E40 (PMS), E90 (STS), 以及 E94 (CJM).
Linux OS提高耐受性降低成本
安捷倫4080系列系統軟件,安捷倫SPECS測試外殼和SPECS-FA測試外殼都采用Linux操作系統,節省成本。基于Linux系統的硬件成本更低且更易于維修。
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4080 Series of Parametric Test Systems
Existing and new wafer fabs running advanced processes face ever-greater parametric testing challenges. Out of necessity, parametric test has expanded beyond pure DC measurement and now spans a variety of different measurement types, including parallel test, Flash cell write/erase testing, and RF S-parameter characterization. Anticipating these needs, Agilent has developed the versatile and flexible 4080 parametric test platform.
Next generation test platform boosts performance with ultra-fast CPU
The newly-designed 4080 platform incorporates a more powerful CPU and other architecture improvements that boost the throughput of transferred 4070 plans by 10 to 20 percent without any program modifications. This reduces test times and saves you money.
Virtual Multiple Testhead Technology offers dramatic throughput improvements
All 4080 Series testers running SPECS support both synchronous and asynchronous parallel test using Agilent‘s Virtual Multiple Testhead Technology. Using this technique in conjunction with the appropriate test element group (TEG) design, it is possible to get throughput improvements of up to 50% over conventional serial techniques.
Flexible configuration minimizes costs
4080 Series testers are available in two versions: standard low-current and ultra-low current, allowing you to select the most cost-effective configuration for each 4080 Series tester that you purchase.
High-speed capacitance measurement reduces test times
4080 Series testers all support an optional high-speed capacitance measurement unit (HS-CMU) that is integrated into the test head electronics.
HV-SPGU supports testing of next-generation Flash memory cell processes
The 4082F and 4083A both support a Semiconductor Pulse Generator Unit (SPGU) mainframe and high-voltage SPGU (HV-SPGU) modules that permit testing of advanced Flash memory cell technologies.
RF S-parameter measurement and optional RF matrix permit efficient testing of RF structures in production
The 4083A supports an Agilent PNA for 20 GHz S-parameter measurements. In addition, an 8x10 RF matrix option with 20 GHz bandwidth is also available to enable the test of up to 5 RF test structures in a single touchdown.
Uniform hardware platform protects your investment
All members of the 4080 Series share the same hardware, and it is easy to upgrade from one model to another. This protects your investment and insures that your equipment does not become obsolete.
Conformance to SEMI standards facilitates test automation
SPECS-FA, the factory automation version of Agilent‘s SPECS test shell, runs on all models of the 4080 Series tester family. SPECS-FA fully supports SEMI automation standards E5 (SECS II), E30 (GEM), E87 (CMS), E39 (OSS), E40 (PMS), E90 (STS), and E94 (CJM).
Linux OS improves supportability and lowers costs
The Agilent 4080 Series system software and Agilent SPECS and SPECS-FA test shells use the Linux operating system. This saves money through the use of cheaper and more maintainable Linux-based system hardware. [/COLOR]

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